Rigaku Unveils XTRAIA XD-3300: Revolutionizing Semiconductor Manufacturing with Ultrafast, Non-Destructive Metrology
In response to the rapidly evolving demands of the semiconductor industry, Rigaku Corporation, a global leader in X-ray metrology systems and part of Rigaku Holdings Corporation (headquartered in Akishima, Tokyo), has officially launched the mass production of its groundbreaking XTRAIA XD-3300 system. This high-resolution microspot X-ray diffraction tool is designed to meet the growing needs of next-generation memory and logic semiconductor manufacturing, offering unparalleled precision, speed, and reliability.
The Growing Demand for Advanced Semiconductors
The semiconductor industry is undergoing a transformative phase, driven by the explosive growth of generative AI, data centers, and other compute-intensive applications. To keep pace with these advancements, chipmakers are aggressively scaling down their processes and exploring 3D architectures for semiconductors. Technologies such as high-bandwidth memory (HBM) and 3D DRAM, alongside cutting-edge logic nodes like 2 nm and beyond, are becoming critical to achieving higher performance and efficiency.
Central to these innovations is the adoption of superlattices—nanoscale integrated structures created using silicon (Si) and silicon-germanium (SiGe) processes. These intricate layers play a vital role in enhancing device performance, but they also present significant challenges in terms of quality control. Accurately measuring the composition and thickness of Si/SiGe films is essential for optimizing product performance and yield, making advanced metrology solutions indispensable.
Introducing XTRAIA XD-3300: A Game-Changer in Metrology
To address these challenges, Rigaku has developed the XTRAIA XD-3300, an innovative metrology system built entirely in-house—from the X-ray optical system to the detector and specialized diffraction software. This system stands out as the world’s only solution capable of performing direct, non-destructive diffraction measurements on microscopic pads of wafers with unmatched resolution.
At the heart of the XTRAIA XD-3300 lies its proprietary X-ray optical system, which combines ultra-high-performance mirrors with bent crystals. This design enables measurements that are up to 100 times faster than previous models. Tasks that once took several hours can now be completed in mere minutes, significantly boosting throughput while maintaining exceptional accuracy. This leap in speed makes the system highly adaptable for integration into high-volume production lines.
Complementing its hardware, the XTRAIA XD-3300 features advanced diffraction software that delivers precise numerical analysis of complex multilayer superlattices. This software provides detailed insights into the periodicity and boundary-surface quality of Si/SiGe structures, empowering manufacturers to refine their processes during both development and mass production phases.
Supporting Next-Generation Semiconductor Production
Rigaku anticipates robust demand for the XTRAIA XD-3300, projecting sales to exceed JPY 1 billion (approximately USD 6.9 million) in FY2025. To prepare for this surge, the company has expanded its production capacity, including the construction of a new factory building and increasing the number of production booths to 15. Starting from Q4 FY2025, Rigaku plans to deliver the system to multiple global semiconductor manufacturers, with a long-term target of reaching JPY 10 billion (approximately USD 69 million) in sales by FY2030.
Kiyoshi Ogata, Senior Executive Vice President and Product Division General Manager at Rigaku, expressed his confidence in the product’s potential:
“The XTRAIA XD-3300 represents the culmination of Rigaku’s decades of expertise in X-ray technology. We have already delivered this system to several leading-edge semiconductor manufacturers developing next-generation devices using Si/SiGe superlattices. As the industry moves toward mass production of these advanced semiconductors, we expect the XTRAIA XD-3300 to play a pivotal role in ensuring quality control through high-resolution, non-destructive measurements. This capability will be indispensable for supporting the future of semiconductor manufacturing.”
Key Features of XTRAIA XD-3300
- High-Resolution, Non-Destructive Analysis
The XTRAIA XD-3300 offers direct visual observation of nanoscale, multi-layer structures with remarkable detail. It performs non-destructive diffraction on fine pads smaller than 40 µm across, delivering world-class resolution that directly contributes to improved yields. - Unmatched Measurement Speed
Leveraging the latest X-ray convergence optics and mirror technology, the system generates the world’s brightest small-spot X-ray beam. This breakthrough enables measurement tasks to be completed up to 100 times faster than earlier models, dramatically enhancing throughput. - Advanced Diffraction Software
Equipped with the industry’s only software capable of analyzing complex superlattice structures, the XTRAIA XD-3300 provides accurate numerical results for the periodicity and boundary-surface quality of Si/SiGe and other multilayer materials. This capability supports both high-volume manufacturing and the development of cutting-edge memory and logic devices.
Enabling the Future of Semiconductor Innovation
As the semiconductor industry continues to push the boundaries of miniaturization and complexity, tools like the XTRAIA XD-3300 are becoming increasingly vital. By enabling rapid, non-destructive analysis of nanoscale structures, Rigaku’s latest innovation empowers manufacturers to overcome the challenges associated with next-generation memory and logic devices.
The XTRAIA XD-3300 not only accelerates production timelines but also enhances the precision and reliability of quality control processes. As more manufacturers adopt this technology, it is poised to become a cornerstone of semiconductor fabrication, driving advancements in fields ranging from artificial intelligence to quantum computing.
With its commitment to innovation and excellence, Rigaku is well-positioned to lead the charge in shaping the future of semiconductor metrology. The launch of the XTRAIA XD-3300 marks a significant milestone in the company’s journey, reaffirming its role as a trusted partner for global semiconductor leaders navigating the complexities of tomorrow’s technologies.
About the Rigaku Group
Since its establishment in 1951, the engineering professionals of the Rigaku group have been dedicated to benefiting society with leading-edge technologies, notably including its core fields of X-ray and thermal analysis. With a market presence in over 90 countries and some 2,000 employees from 9 global operations, Rigaku is a solution partner in industry and research analysis institutes. Our overseas sales ratio has reached approximately 70% while sustaining an exceptionally high market share in Japan. Together with our customers, we continue to develop and grow. As applications expand from semiconductors, electronic materials, batteries, environment, resources, energy, life science to other high-tech fields, Rigaku realizes innovations “To Improve Our World by Powering New Perspectives.”
For details, please visit rigaku-holdings.com/english
