Gigaphoton Deploys KrF Excimer Laser for Advanced Packaging at Japanese Semiconductor R&D Firm

Strategic Expansion into Advanced Packaging Applications

Gigaphoton Inc., a leading provider of light sources for semiconductor lithography, has successfully delivered and installed its G300K excimer laser system at a Japanese semiconductor research and development company. The installation was completed in November 2025, marking a significant step in the company’s efforts to extend its core technology beyond traditional photolithography into advanced packaging processes.

This deployment underscores a growing industry trend toward heterogeneous integration, particularly in high-performance computing and artificial intelligence applications. As chip architectures evolve, the demand for compact, high-density packaging solutions—such as 2.5D and 3D packages using chiplets—has intensified. These advanced packaging techniques require precision micro-processing capabilities that conventional tools often cannot deliver. Gigaphoton’s entry into this space leverages its deep expertise in laser-based manufacturing technologies.

Technical Specifications and Application Focus

High-Precision Ablation for Micro-Via Formation

The G300K is a KrF (248nm) excimer laser designed specifically for ultra-fine ablation processing in semiconductor package substrates. It operates at high power and high repetition rates while maintaining long-term reliability through durable, long-life modules. This combination enables consistent performance over extended production cycles—a critical factor for manufacturers seeking scalability and yield optimization.

Its primary application lies in creating micro-via holes with diameters of 10 micrometers or less, along with precise trench patterns essential for interconnect structures in advanced packaging. These features are foundational for integrating multiple chiplets onto a single substrate, allowing for improved signal integrity, thermal management, and overall performance.

Integration with ORC Manufacturing Equipment

The G300K has been seamlessly integrated into processing equipment manufactured by ORC MANUFACTURING CO., LTD., a company specializing in semiconductor fabrication tools. This collaboration highlights the importance of ecosystem partnerships in advancing next-generation manufacturing technologies. By combining Gigaphoton’s laser source with ORC’s mechanical and control systems, the resulting platform offers a complete solution tailored for high-precision ablation tasks in advanced packaging workflows.

Such integrations are increasingly common as semiconductor manufacturers seek turnkey systems that reduce setup complexity and improve process repeatability. The synergy between light source providers and equipment makers accelerates time-to-market for new packaging technologies, especially as AI-driven chipsets demand higher interconnect density and faster data throughput.

Industry Relevance and Future Outlook

Supporting the Rise of Chiplet-Based Architectures

The adoption of chiplets—smaller, modular chips that can be combined into larger systems—is accelerating across the semiconductor industry. This approach allows for greater design flexibility, improved yield, and faster time-to-market for complex devices. However, it also places stringent demands on packaging technologies, requiring finer interconnects and more reliable via formation.

Gigaphoton’s G300K directly addresses these challenges. Its ability to create sub-10μm vias with minimal thermal damage makes it ideal for 2.5D and 3D packaging applications. As AI chipsets continue to grow in complexity, with increasing numbers of compute and memory chiplets stacked together, tools like the G300K become indispensable for achieving the required precision and throughput.

Demonstration at SEMICON Japan 2025

The results from the initial deployment will be showcased at SEMICON Japan 2025, scheduled to begin on December 17, 2025. This event serves as a key platform for semiconductor equipment manufacturers and researchers to demonstrate innovations in materials, processes, and tools. Gigaphoton’s participation reflects its commitment to transparency and collaboration within the broader industry ecosystem.

By exhibiting real-world processing outputs, the company aims to validate the performance and reliability of the G300K under industrial conditions. Such demonstrations are crucial for building confidence among potential customers and partners who are evaluating new technologies for their own manufacturing lines.

Leadership Perspective and Long-Term Vision

Commitment to Diversification and Innovation

Tatsuo Enami, President and CEO of Gigaphoton, emphasized the strategic importance of expanding the company’s technological footprint. “In Gigaphoton, alongside our research and development of light sources for semiconductor lithography, we have also been exploring various possibilities for the application of excimer lasers in other fields,” he stated.

This diversification strategy positions Gigaphoton not only as a supplier of lithography tools but also as an enabler of emerging semiconductor manufacturing processes. By applying its core competencies in laser physics and engineering to new domains, the company is reinforcing its role as a critical infrastructure provider in the global semiconductor supply chain.

Enami further noted that Gigaphoton will continue to accelerate its R&D initiatives to explore additional applications for excimer lasers. This forward-looking approach aligns with broader industry trends, where innovation is no longer confined to individual components but spans entire manufacturing ecosystems.

About GIGAPHOTON

Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit https://gigaphoton.com/

Source link

Share your love